Previous Page  9 / 10 Next Page
Information
Show Menu
Previous Page 9 / 10 Next Page
Page Background

[7] Makeev M.O., Ivanov Yu.A., Meshkov S.A., Gil’man A.B., Yablokov

M.Yu

.

The investigation of physico-chemical properties of ptfe surface by ir spectral

ellipsometry.

Nanotekhnika

[Nanotechnics], 2011, no. 3, pp. 27–32 (in Russ.).

[8] Makeev M.O., Ivanov Yu.A., Vetrova N.A., Kozubnyak S.A. Infrared Spectroscopic

Ellipsometry Investigation in Organometallic Heterostructures.

Vestn. Mosk. Gos.

Tekh. Univ. im. N.E. Baumana, Priborostr., Spetsvyp “Nanoinzheneriya”

[Herald of

the Bauman Moscow State Tech. Univ., Instrum. Eng., Spec. Issue Nano Ingineering],

2010, pp. 80–91 (in Russ.). Available at:

http://baumanpress.ru/vestnik/2/151.pdf

[9] Makeev M.O., Ivanov Yu.A., Meshkov S.A. The investigation of degradation

phenomena of nanoscale AlAs/GaAs heterostructures by IR-spectral ellipsometry.

Nanoinzheneriya

[Nano Ingineering], 2011, no. 10, pp. 44–48 (in Russ.).

[10] Makeev M.O., Ivanov Yu.A., Meshkov S.A., Sinyakin

V.Yu

.

Journal of Nano and

Microsystem Technique

, 2014, no. 12, pp. 23–29.

[11] Makeev M.O., Ivanov Yu.A., Meshkov S.A., Litvak Yu.N., Vetrova N.A.

Investigation of degradation of resonant tunneling diodes based on nanoscale

AlAs/GaAs heterostructures.

Jelektr. nauchno-tekh. izd. “Inzhenernyy zhurnal:

nauka i innovacii”

[El. Sc.-Tech. Publ. “Eng. J.: Science and Innovation”, 2013,

no. 6 (18). Available at:

http://engjournal.ru/catalog/nano/hidden/811.html

[12] IR-VASE User’s Manual. J.A. Woollam Co., Inc., 2006.

[13] Tompkins H.G., Irene E.A., eds. Handbook of ellipsometry. William Andrew

Publishing, Springer, 2005. 870 p.

[14] Wooten F. Optical Properties of Solids. N.Y., Academic Press, 1972.

[15] Palik E.D. Handbook of optical constants of solids. Vol. 1. N.Y., Academic Press,

1985. 785 р.

[16] Weber M.J. Handbook of Optical Materials. CRC Press, 2002. 536 p.

[17] SEMI MF1618-1110 — Practice for Determination of Uniformity of Thin Films on

Silicon Wafers, 2004.

[18] Rodionov I.A. Razrabotka litograficheskikh protsessov izgotovleniya SBIS s

razmerami elementov men’she dliny volny eksponiruyushchego izlucheniya.

Diss.

kand. tekhn. nauk

[The development of lithographic manufacturing processes

for VLSI circuits with element dimensions smaller than the exposing radiation

wavelength. Cand. tech. sci. diss.]. Moscow, MGTU im. N.E. Baumana, 2010.

Статья поступила в редакцию 23.09.2015

Макеев Мстислав Олегович — канд. техн. наук, инженер 1-й категории МГТУ

им. Н.Э. Баумана.

МГТУ им. Н.Э. Баумана, Российская Федерация, 105005, Москва, 2-я Бауманская ул.,

д. 5.

Makeev M.O. — Ph.D.(Eng.), engineer, Bauman Moscow State Technical University.

Bauman Moscow State Technical University, 2-ya Baumanskaya ul. 5, Moscow, 105005

Russian Federation.

Родионов Илья Анатольевич — канд. техн. наук, доцент, директор НОЦ МГТУ

им. Н.Э. Баумана.

МГТУ им. Н.Э. Баумана, Российская Федерация, 105005, Москва, 2-я Бауманская ул.,

д. 5.

Rodionov I.A. — Ph.D. (Eng.), Associate Professor, Director of Scientific and Educational

Center, Bauman Moscow State Technical University.

Bauman Moscow State Technical University, 2-ya Baumanskaya ul. 5, Moscow, 105005

Russian Federation.

Зверев Александр Вячеславович — инженер 2-й категории МГТУ им. Н.Э. Баумана.

МГТУ им. Н.Э. Баумана, Российская Федерация, 105005, Москва, 2-я Бауманская ул.,

д. 5.

Zverev A.V. — engineer, Bauman Moscow State Technical University.

Bauman Moscow State Technical University, 2-ya Baumanskaya ul. 5, Moscow, 105005

Russian Federation.

ISSN 0236-3933. Вестник МГТУ им. Н.Э. Баумана. Сер. “Приборостроение”. 2015. № 6 133