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Vestn.
Mosk. Gos. Tekh. Univ. im. N.E. Baumana, Priborostr.
[Herald of the Bauman Moscow State
Tech. Univ., Instrum. Eng.], 2016, no. 3, pp. 3–12 (in Russ.).
DOI: 10.18698/0236-3933-2016-3-3-12
Tsepulin V.G.
— Junior Research Scientist of Scientific Educational Center Photonics and
IR-Technology, Bauman Moscow State Technical University (2-ya Baumanskaya ul. 5, str. 1,
Moscow, 105005 Russian Federation).
Tolstoguzov V.L.
—
Junior Research Scientist of Scientific Educational Center Photonics and
IR-Technology, Bauman Moscow State Technical University (2-ya Baumanskaya ul. 5, str. 1,
Moscow, 105005 Russian Federation).
Stepanov R.O.
— Cand. Sc. (Eng.), Deputy Director of Scientific Research Institute of Radio-
electronics and Laser Technology, Bauman Moscow State Technical University (2-ya Bauman-
skaya ul. 5, str. 1, Moscow, 105005 Russian Federation).
Karasik V.E.
— Dr. Sc. (Eng.), Professor of Laser and Optoelectronic Systems Department,
Bauman Moscow State Technical University (2-ya Baumanskaya ul. 5, str. 1, Moscow, 105005
Russian Federation).
Please cite this article in English as:
Tsepulin V.G., Tolstoguzov V.L., Stepanov R.O., Karasik V.E. Error Estimation of Measuring
Multilayer Film Coating Thickness by Spectral Reflectometry Method.
Vestn. Mosk. Gos. Tekh.
Univ. im. N.E. Baumana, Priborostr.
[Herald of the Bauman Moscow State Tech. Univ.,
Instrum. Eng.], 2017, no. 3, pp. 4–12. DOI: 10.18698/0236-3933-2017-3-4-12