Search by keyword: "profilometry"
Error Estimation of Measuring Multilayer Film Coating Thickness by Spectral Reflectometry Method
| Authors: Tsepulin V.G., Tolstoguzov V.L., Stepanov R.O., Karasik V.Ye. | Published: 28.05.2017 |
| Published in issue: #3(114)/2017 | |
| DOI: 10.18698/0236-3933-2017-3-4-12 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Instrumentation and Methods to Control Environment, Substances, Materials, and Products | |
| Keywords: multilayer film structures, reflectometry, profilometry, thin films, thickness measurement errors | |
Тhickness Distribution Measurement of Multilayer Film Structures by Spectral Reflectometry Methods
| Authors: Tsepulin V.G., Tolstoguzov V.L., Karasik V.Ye., Perchik A.V., Arefev A.P. | Published: 15.06.2016 |
| Published in issue: #3(108)/2016 | |
| DOI: 10.18698/0236-3933-2016-3-3-12 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Instruments and Measuring Methods | |
| Keywords: multilayer film structures, reflectometry, profilometry, acousto-optical filter, thin films | |