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Error Estimation of Measuring Multilayer Film Coating Thickness by Spectral Reflectometry Method
| Authors: Tsepulin V.G., Tolstoguzov V.L., Stepanov R.O., Karasik V.Ye. | Published: 28.05.2017 |
| Published in issue: #3(114)/2017 | |
| DOI: 10.18698/0236-3933-2017-3-4-12 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Instrumentation and Methods to Control Environment, Substances, Materials, and Products | |
| Keywords: multilayer film structures, reflectometry, profilometry, thin films, thickness measurement errors | |