Error Estimation of Measuring Multilayer Film Coating Thickness by Spectral Reflectometry Method
| Authors: Tsepulin V.G., Tolstoguzov V.L., Stepanov R.O., Karasik V.Ye. | Published: 28.05.2017 |
| Published in issue: #3(114)/2017 | |
| DOI: 10.18698/0236-3933-2017-3-4-12 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Instrumentation and Methods to Control Environment, Substances, Materials, and Products | |
| Keywords: multilayer film structures, reflectometry, profilometry, thin films, thickness measurement errors | |
This work focuses on an approach to error estimation of measuring multilayer film coating thickness by spectral reflectometry method. The approach is based on the linearized regression model. The measurements of the test coating sample showed that disagreement of random error estimates, obtained by the proposed approach with the experimental values is not more than 30 % for the thickness measured with an accuracy of subnanometer.
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