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Тhickness Distribution Measurement of Multilayer Film Structures by Spectral Reflectometry Methods
| Authors: Tsepulin V.G., Tolstoguzov V.L., Karasik V.Ye., Perchik A.V., Arefev A.P. | Published: 15.06.2016 |
| Published in issue: #3(108)/2016 | |
| DOI: 10.18698/0236-3933-2016-3-3-12 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Instruments and Measuring Methods | |
| Keywords: multilayer film structures, reflectometry, profilometry, acousto-optical filter, thin films | |