14 / 15
Численное моделирование процессов тепломассопереноса…
ISSN 0236-3933. Вестник МГТУ им. Н.Э. Баумана. Сер. Приборостроение. 2017. № 5
83
[17]
Rhoads D.S., Guan J.-L. Analysis of directional cell migration on defined FN gradients:
Role of intracellular signaling molecules.
Exp. Cell Res
., 2007, vol. 313, no. 18, pp. 3859–3867.
DOI: 10.1016/j.yexcr.2007.06.005
[18] Doyle P.S. Self-assembled magnetic matrices for DNA separation chips.
Science
, 2002,
vol. 295, no. 5563, pp. 2237–2237. DOI: 10.1126/science.1068420
[19]
Liu K.-K., Wu R.-G., Chuang Y.-J., Khoo H.S., Huang S.-H., Tseng F.-G. Microfluidic
systems for biosensing.
Sensors
, 2010, vol. 10, no. 7, pp. 6623–6661. DOI: 10.3390/s100706623
[20]
Iwanaga S., Smith N., Fujita K., Kawata S., Nakamura O. Single-pulse cell stimulation
with a near-infrared picosecond laser.
Appl. Phys. Lett
., 2005, vol. 87, no. 24, pp. 243901.
DOI: 10.1063/1.2147733
[21] Dittrich P.S., Manz A. Single-molecule fluorescence detection in microfluidic channels —
the Holy Grail in μTAS?
Anal. Bioanal. Chem
., 2005, vol. 382, iss. 8, pp. 1771–1782.
DOI: 10.1007/s00216-005-3335-9
[22] Mayer F., Salis G., Funk J., Paul O., Baltes H. Scaling of thermal CMOS gas flow
microsensors: Experiment and simulation.
Proc. of the IEEE Micro Electro Mechanical Systems
(MEMS)
, pp. 116–121. DOI: 10.1109/MEMSYS.1996.493839
[23] Komiya K., Higuchi F., Ohtani K. Characteristics of a thermal gas flowmeter.
Rev. Sci.
Instrum
., 1988, vol. 59, no. 3, pp. 477–479. DOI: 10.1063/1.1139864
[24]
Lammerink T.S.J., Tas N.R., Elwenspoek M., Fluitman J.H.J. Micro-liquid flow sensor.
Sensors Actuators A: Phys
., 1993, vol. 37–38, no. C, pp. 45–50.
DOI: 10.1016/0924-4247(93)80010-E
[25] Nguyen N.T., Dötzel W. Asymmetrical locations of heaters and sensors relative to each
other using heater arrays: A novel method for designing multi-range electrocaloric mass-flow
sensors.
Sensors and Actuators A: Phys
., 1997, vol. 62, no. 1-3, pp. 506–512.
DOI: S0924-4247(97)01529-X
[26]
Xu W., Song K., Ma S., Gao B., Chiu Yi, Lee Yi-K. Theoretical and experimental
investigations of thermoresistive micro calorimetric flow sensors fabricated by CMOS MEMS
technology.
J. Microelectromechanical Syst
., 2016, vol. 25, no. 5, pp. 954–962.
DOI: 10.1109/JMEMS.2016.2596282
[27]
Rasmussen A., Mavriplis C., Zaghloul M.E., Mikulchenko O., Mayaram K. Simulation
and optimization of a microfluidic flow sensor.
Sensors Actuators A: Phys
., 2001, vol. 88, no. 2,
pp. 121–132. DOI: 10.1016/S0924-4247(00)00503-3
[28]
Lien V., Vollmer F. Microfluidic flow rate detection based on integrated optical fiber
cantilever.
Lab Chip
, 2007, vol. 7, no. 10, pp. 1352–1356. DOI: 10.1039/B706944H
[29]
Lin C.-H., Lee G.-B., Lin Y.-H., Chang G.-L. A new fabrication process for ultra-thick
microfluidic microstructures utilizing SU-8 photoresist.
J. Micromechanics Microengineering
,
2002, vol. 12, no. 5, pp. 590–597. DOI: 10.1088/0960-1317/12/5/312
[30] McDonald J.C., Whitesides G.M. Poly(dimethylsiloxane) as a material for fabricating
microfluidic devices.
Acc. Chem. Res
., 2002, vol. 35, no. 7, pp. 491–499.
DOI: 10.1021/ar010110q
[31] Wu S., Lin Q., Yuen Y., Tai Yu-Ch. MEMS flow sensors for nano-fluidic applications.
Sensors Actuators A: Phys
., 2001, vol. 89, no. 1-2, pp. 152–158.
DOI: 10.1016/S0924-4247(00)00541-0
[32]
Landau L.D., Lifshits E.M. Teoreticheskaya fizika. Gidrodinamika [Theoretical physic.
Hydrodynamics]. Moscow, Fizmatlit Publ., 2001. 736 p.