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Interferometer to Control Wedge Angles
| Authors: Timashova L.N., Kulakova N.N. | Published: 06.06.2020 |
| Published in issue: #2(131)/2020 | |
| DOI: 10.18698/0236-3933-2020-2-117-129 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Optical and Optoelectronic Instruments and Complexes | |
| Keywords: optical wedge, planar wafer, interferometer, interference pattern, interference fringe, optoelectronic system, objective lens, image sensor, measurement error, laser | |