Interferometer to Control Wedge Angles

The paper considers an optoelectronic laser interferometer system to control wedge angles. This system records an interference pattern on an image sensor. The interferometer makes it possible to estimate the small angle of the wedge under investigation by the variation it introduces into the shape of the optical radiation wavefront, which the interferometer then converts into changing the size of the interference pattern. In the interferometer considered, the wedge under investigation refracts the incident ray cone. The error inherent in surface finishing causes the deformation of the working wavefront to be 2 to 4 times smaller as compared to the deformation in previously known control setups involving reflection from the wedge surfaces. The interferometer developed ensures highly accurate control of wedge angles at the surface polishing stage, including potential detection of wedge direction. If required, the interferometer may be used for comprehensive quality control of wedge manufacturing, assessing not only the surface nonplanarity, but also glass inhomogeneity; it may also be used to control prism angles

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