Search by keyword: "topology"
Polynomial Model of Chemical-Mechanical Planarization in Production of Sub-Micrometer VLSIC
| Authors: Amirkhanov A.V. , Gladkikh A.A. , Makarchuk V.V. , Pshennikov A.G. , Shakhnov V.A. | Published: 09.09.2013 |
| Published in issue: #2(87)/2012 | |
| DOI: | |
| Category: Design and technology | |
| Keywords: chemical-mechanical planarization, crystal, interlayer insulation, multilevel metallization, planarization range, yield, topology, convolution, polynomial | |
Algorithms of Topology Transformation of Submicron Very Large-Scale Integration Circuits
| Authors: Shakhnov V.A., Zinchenko L.A., Rezchikova Ye.V., Averyanikhin A.Ye. | Published: 30.08.2013 |
| Published in issue: #1(82)/2011 | |
| DOI: | |
| Category: Design and technology | |
| Keywords: topology, VLSIC, double photomask | |