All articles by "Makeev M.O."
Analyzing Electrical Characteristics Kinetics of the Subharmonic SHF Mixer Based on a Resonant Tunnell Diode Exposed to the Operational Factor Influence
| Authors: Cherkasov K.V., Meshkov S.A., Makeev M.O., Shashurin V.D., Fedorkova N.V. | Published: 01.07.2025 |
| Published in issue: #2(151)/2025 | |
| DOI: | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Design and Instrument Engineering Technology and Electronic Equipment | |
| Keywords: SHF subharmonic mixer, reliability, quality assurance, resonant tunnel diode, gradual failure | |
Research into characteristics and methods of resist coating by infrared spectral ellipsometry
| Authors: Makeev M.O., Zverev A.V., Rodionov I.A. | Published: 23.12.2015 |
| Published in issue: #6(105)/2015 | |
| DOI: 10.18698/0236-3933-2015-6-125-134 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Design and Instrument Engineering Technology and Electronic Equipment | |
| Keywords: microelectronic devices, lithography, ultraviolet resist, centrifuge process, infrared spectral ellipsometry, layer thickness, optical constants | |