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Computation of a Beam Micro-Opto-Electro-Mechanical Linear Acceleration Transducer Based on the Optical Tunnel Effect
| Authors: Busurin V.I., Makarenkova N.A., Zaw Lwin Htoo | Published: 24.01.2025 |
| Published in issue: #4(149)/2024 | |
| DOI: | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Information-Measuring and Control Systems | |
| Keywords: micro-opto-electro-mechanical transducer, linear acceleration, optical modulator, optical tunnel effect, sensitivity, nonlinearity error, computation algorithm | |