Computation of a Beam Micro-Opto-Electro-Mechanical Linear Acceleration Transducer Based on the Optical Tunnel Effect

Abstract

The paper considers functional diagram of a linear acceleration transducer with a modulator based on the optical tunnel effect designed to obtain information on the nanometer motion of a beam sensitive element arising under the linear accelerations action. It determines a set of parameters of the optical modulator of the micro-opto-electro-mechanical linear acceleration transducer to ensure the linear accelerations measurement in a given range with a given nonlinearity error. Dependence of the conversion function nonlinearity error on the optical modulator sensitivity alteration range is identified basing on the optical tunnel effect when using the different wavelengths. The sensitive element motion range is determined by the permissible alteration in the optical modulator sensitivity depending on the value of the m parameter found with a given nonlinearity error in the conversion function. The paper proposes an algorithm for computing a beam micro-opto-electro-mechanical linear acceleration transducer based on the optical tunnel effect. The algorithm uses a mathematical model of the linear acceleration transducer and makes it possible to determine parameters of the optical, mechanical and electronic parts of the transducer based on a set of the initial data. Software is developed that implements the algorithm for computing design parameters of the beam micro-opto-electro-mechanical linear acceleration transducer to measure linear accelerations in a given range with a given nonlinearity error in the conversion function

The work was supported by the Russian Science Foundation (grant no. 23-29-00954, https://rscf.ru/project/23-29-00954)

Please cite this article in English as:

Busurin V.I., Makarenkova N.A., Zaw Lwin Htoo. Computation of a beam micro-opto-electro-mechanical linear acceleration transducer based on the optical tunnel effect. Herald of the Bauman Moscow State Technical University, Series Instrument Engineering, 2024, no. 4 (149), pp. 25--40 (in Russ.). EDN: ZRJVRH

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