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TiO2 Photocatalytic Film Formation by Reactive Magnetron Sputtering using the Guasi-Closed Space
| Authors: Shashin D.E., Dyachkov A.D. | Published: 02.10.2024 |
| Published in issue: #3(148)/2024 | |
| DOI: | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Design and Instrument Engineering Technology and Electronic Equipment | |
| Keywords: titanium dioxide, thin films, photocatalysis, quasi-closed space, magnetron sputtering | |