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Development of Manufacturing Technology of Photo-Dielectric Sensitive Element of Ultraviolet Range on the Basis of Thin Films of Zinc Oxide
| Authors: Shashin D.E., Sushentsov N.I. | Published: 16.12.2019 |
| Published in issue: #6(129)/2019 | |
| DOI: 10.18698/0236-3933-2019-6-99-109 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Design and Instrument Engineering Technology and Electronic Equipment | |
| Keywords: photodielectric effect, ultraviolet radiation, thin films, zinc oxide, magnetron sputtering | |