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Laser Reflectometric Method of Measuring the Thickness and Optical Characteristics of Thin Films in the Process of Their Growth
| Authors: Belov M.L., Belov A.M., Gorodnichev V.A., Kozintsev V.I., Fedotov Yu.V. | Published: 30.08.2013 |
| Published in issue: #2(83)/2011 | |
| DOI: | |
| Category: Laser and opto-electronic systems | |
| Keywords: thin film, growth, thickness, optical characteristics, laser refractometry | |