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Direct Process Control of Thin Film Synthesis During Production of Very-Large-Scale Integrated Circuits
| Authors: Obraztsov D.V., Chernyshov V.N., Shakhnov V.A. | Published: 28.11.2017 |
| Published in issue: #6(117)/2017 | |
| DOI: 10.18698/0236-3933-2017-6-17-27 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Design and Instrument Engineering Technology and Electronic Equipment | |
| Keywords: thin films, vacuum deposition, direct control, production, very-large-scale integrated circuit | |