Direct Process Control of Thin Film Synthesis During Production of Very-Large-Scale Integrated Circuits

Authors: Obraztsov D.V., Chernyshov V.N., Shakhnov V.A. Published: 28.11.2017
Published in issue: #6(117)/2017  
DOI: 10.18698/0236-3933-2017-6-17-27

Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Design and Instrument Engineering Technology and Electronic Equipment  
Keywords: thin films, vacuum deposition, direct control, production, very-large-scale integrated circuit

The article deals with a method for direct process control of electrophysical parameters of thin films, used in production of very-large-scale integrated circuits. We present an algorithm for implementing this method so as to achieve minimum deviations in film parameters, which makes it possible to produce these circuits according to more advanced design standards


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