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of technical solutions in the sphere of micro-nano-electronic mechanic systems.

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Статья поступила в редакцию 22.04.2015

Адамов Александр Петрович — д-р техн. наук, профессор кафедры “Микроэлектро-

ника” Дагестанского государственного технического университета.

Дагестанский государственный технический университет, Российская Федерация,

367015, Республика Дагестан, Махачкала, пр-т Имама Шамиля, д. 70.

Adamov A.P. —

D.Sc.

(Eng.), Professor, Department of Microelectronics, Daghestan State

Technical University.

Daghestan State Technical University, I. Shamil prospect 70, Makhachkala, 367015

Russian Federation.

Адамова Арина Александровна — канд. техн. наук, доцент кафедры “Проектирование

и технология производства электронной аппаратуры” МГТУ им. Н.Э. Баумана.

МГТУ им. Н.Э. Баумана, Российская Федерация, 105005, Москва, 2-я Бауманская ул.,

д. 5.

Adamova A.A. — Ph.D. (Eng.), Associate Professor, Department of Design and Production

Technology of Electronic Equipment, Bauman Moscow State Technical University.

Bauman Moscow State Technical University, 2-ya Baumanskaya ul. 5, Moscow, 105005

Russian Federation.

Власов Андрей Игоревич — канд. техн. наук, доцент кафедры “Проектирование и

технология производства электронной аппаратуры” МГТУ им. Н.Э. Баумана.

МГТУ им. Н.Э. Баумана, Российская Федерация, 105005, Москва, 2-я Бауманская ул.,

д. 5.

Vlasov A.V. — Ph.D. (Eng.), Associate Professor, Department of Design and Production

Technology of Electronic Equipment, Bauman Moscow State Technical University.

Bauman Moscow State Technical University, 2-ya Baumanskaya ul. 5, Moscow, 105005

Russian Federation.

122 ISSN 0236-3933. Вестник МГТУ им. Н.Э. Баумана. Сер. “Приборостроение”. 2015. № 5