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Content Pattern Application in Optical Microelectromechanical Systems Ontology Development Process
| Authors: Pilnik I.S., Baklykov D.A., Tsvetkov Yu.B., Rodionov I.A. | Published: 15.04.2026 |
| Published in issue: #1(154)/2026 | |
| DOI: | |
| Category: Informatics, Computer Engineering and Control | Chapter: System Analysis, Control, and Information Processing | |
| Keywords: optical microelectromechanical systems, base elements, microtechnology, ontology, semantic web, pattern | |