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Experimental Study of Load-Bearing Characteristics of Working Element of Thermal Microactuators
| Authors: Kozlov D.V., Smirnov I.P., Zhukov A.A., Shakhnov V.A. | Published: 30.08.2013 |
| Published in issue: #2(83)/2011 | |
| DOI: | |
| Category: Design and technology | |
| Keywords: thermal microactuators, load, force, silicon, polyimide, deformation | |