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Fabrication of Tuning-Fork Gyroscope Resonator using Directed Chemical Etching of Fused Silica
| Authors: Kuznetsov V.S., Maiorov D.V., Andreev P.A. | Published: 13.08.2019 |
| Published in issue: #4(127)/2019 | |
| DOI: 10.18698/0236-3933-2019-4-32-44 | |
| Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Navigation Instruments | |
| Keywords: fused silica, hydrofluoric acid, chemical etching, laser, structuring, gyroscope, resonator | |