Laser Holoellipsometer of the Light Scattering and Reflection from the Uniaxial Two-Dimensional Crystal

The developed optical design and principle of operation are presentedfor the first time for the device, assembled as a single combination ofin situ simultaneously functioning holoellipsometries of scattering and reflection of polarized light by a sample of the optically uniaxial two-dimensional crystal in directions close to the normal to the sample. The basic equations of the holoeШpsometrу method implemented adequately by the presented unit are deduced. A significant difference of results obtained in this study from those known in the practice of polarization measurements of light scattering is that for the first time it is possible here to measure simultaneously in real time the moduli (proper, not their ratio) of the complex amplitude coefficients of scattering and (not or) reflection of light (in the directions close to the normal to the investigated sample of optically uniaxial transparent two-dimensional crystal) and to find additionally the phase difference for same complex amplitude coefficients of light scattering and reflection. And this possibility of simultaneous measurement of six experimental parameters (rather than two parameters for the traditional ellipsometry) allows for significant improvement of the diagnostic ability of ellipsometry as a basisfor monitoring in situ in situ creation and processing of two-dimensionalnanostructure formations.

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