Up-to-date interferrometric ellipsometer

Layout of the up-to-date interferrometric ellipsometer is proposed. The analysis of measurement error components of a phase difference between interference signals, is performed. The obtained relations allow to calculate an error at known characteristics and operation mode of the ellipsometer units; to optimise operating conditions of these units to achieve a minimum error; to determine the required technical features and operation mode to achieve a prescribed error. Experimental results confirming the obtained dependencies are presented.