Analysis of Interferometer with Micro-Mirror on Beam Splitting Cube

The control of the shape of the optical part surface by the interference method has become an integral part of the process of their shaping. With a precisely focused interferometer interferometry allows obtaining an interference pattern similar to a topographic map of the error profile of the wave surface under investigation. The interferometer must form a map of the optical surface with high accuracy --- the permissible distortion of the interference fringe caused by an interferometer error should not exceed 0.1 of the distortion value caused by an error on the examined surface. The dependence of the interference pattern formation on the errors in the arrangement of the interferometer components, i.e., defocusing, was theoretically analyzed using Fourier transforms. The analysis was performed for an interferometer containing a laser illuminator, a concave spherical mirror with a central hole, coaxial to the illuminator, and a beamsplitting element in the form of a cube-prism with a semitransparent hypotenuse face. On the first flat face of the cube-prism, a microspherical concave mirror is made with the center located on the optical axis of the interferometer. A method for calculating the defocusing of a controlled spherical mirror and the corresponding wave aberration of the working wavefront is presented. An example of calculating the design parameters of the interferometer and the permissible defocusing of the controlled spherical mirror is given

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