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Main Authors Vertyanov D.V.
Vertyanov D.V.

National Research University of Electronic Technology

Moscow, Zelenograd, Russian Federation

Vertyanov D.V.

Batin S.A. --- Design Engineer, Scientific Research Laboratory Advanced Technologies of 3D Microsystems Enclosure and Production, Institute of Nano- and Microsystem Engineering, National Research University of Electronic Technology (Shokina ploshchad 1, Zelenograd, Moscow, 124498 Russian Federation).

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