Technology of Manufacturing of Diffraction and Hologram Optical Parts with Functional Microrelief of Surface by Method of Plasmochemical Etching

The problem of creating the binary functional microrelief on the surface of parts made of optical glass that is dielectric is solved experimentally using the method of the plasmochemical etching at the serial plant Caroline 15 PE. The dependences of the speed and selectivity of the glassetching on the main factors of the process are obtained. The mode is found which provides the polishing etching of the optical glass. The technological process of manufacturing of the appropriate optical parts is presented and justified.