Magnetic Compensation for a Zero Signal in a Two-Axis Hybrid R-R-R-Type MEMS Gyro

Currently a main obstacle to high-performance of MEMS gyros is the quadrature error, which is basically caused by geometry distortion of the flexible suspension during its manufacturing. The two-axis hybrid R-R-R-type MEMS gyro and the causes of originating of the shape distortions of the flexible suspension cross-section, which lead to emergence of pendulum stray oscillations around the gyro output axes, are considered. The way for compensation for a zero signal (induced by the quadrature error) by transforming a shape of the magnetic field in working gaps of torque motors is offered. To increase an efficiency of the offered method, the selection of shape geometry ofmagnetic conductor influencing the magnetic field shape in gaps is performed. The efficiency of the offered method is estimated, and conclusions on the possibilities of its application are drawn.

References

[1] Konovalov S.F., Podchezertsev V.P., Mayorov D.V., Ponomarev Yu.A., Sidorov A.G., Park H.W., Kwon N.Y., Li G.S., Seo J.B. Two-coordinate micromechanical rate sensor with magnetoelectric torques of a feedback on channels of excitation and measurement. Giroskopiya i Navig. [Gyroscopy and Navig.], 2010, no. 3, pp. 61-71 (in Russ).

[2] Konovalov S.F., Ponomarev Yu.A., Maiorov D.V., Podchezercev V.P., Sidorov A.G. Hybrid microelectromechanical gyroscopes and acceleration gages. Nauka Obraz. MGTU im.N.E.Baumana. Elektron. Zh. [Sci. Educ. Bauman Moscow State Tech. Univ. Electron. J.], 2011, no. 10 (in Russ.). URL. http://technomag.edu.ru/doc/219257.html

[3] Konovalov S.F., e.a. Mikromekhanicheskiy vibratsionnyy giroskop [A vibrating micromechanical gyroscope]. Patent RF, no. 2010120200/28(028737), 2010.

[4] Saukoski M., Aaltonen L., Halonen K.A.I. Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes. IEEE Sens. J., 2007, no. 12, pp. 16391651.

[5] Hsu Y.W. Method of cancelling quadrature error in an angular rate sensor: Patent US, no. 6370937, 2002.

[6] Stewart R.E., Wyse S.F. Bias and quadrature reduction in class II coriolis vibratory gyros. Patent US, no. 7565839, 2009.

[7] Weber M.W., Smith R.B. Quadrature reduction in MEMS gyro devices using quad steering voltages: Patent US, no. 7213458, 2007.

[8] Yeh B.Y., Liang Y.C. Modelling and compensation of quadrature error for silicon MEMS microgyroscope. IEEE Trans. Power Electr. Drive Syst. ,2001, vol. 2, pp. 871876.

[9] Seeger J., Astegar A., Tormey M.T. Method and apparatus for electronic cancellation of quadrature error. Patent US, no. 7290435, 2007.