Computation of pressure sensor membrane

Microelecromechanical systems (MEMS) are widely used in the current technology nowadays. Microsensors become important in both measuring values of physical parameters and transforming them into electrical signals. A silicon MEMS transducer is the basic pressure sensor element. Sensitivity and linearity of the output signal are the main criteria for a designer to calculate it. However, there are no specific recommendations about choosing the membrane structure and the layout of resistance strain gauges in the existing research into improving the size and characteristics of the silicon sensitive elements. The authors compare various structural and technological solutions for silicon membranes and provide the recommendations on how to selecting the best one. The problem of sensor optimization is solved.The criteria are chosen as follows: the equality of opposite sign maximum deformations and the minimum nonlinearity of line ar deformations-pressure characteristics. The algorithm was implemented in the ANSYSfinite element software package using the pSeven software. The research resulted in some recommendations for a designer about the membrane structure choice and the layout of resistance strain gauges ensuring the most efficient microsensor operation.

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