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Main Authors Evstafyev S.S.
Evstafyev S.S.

National Research University of Electronic Technology

Zelenograd, Moscow, Russian Federation

Evstafyev S.S.

Evstafyev S.S. --- Assoc. Professor, Institute of Nano- and Microsystem Engineering, National Research University of Electronic Technology (Shokina ploshchad 1, Zelenograd, Moscow, 124498 Russian Federation).

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